Abstract: Natural soil has inherent uncertainties due to the influence of multiple factors.In order to better reflect the distribution of actual soil parameters，a combination of Cholesky decomposition and stochastic finite element model was utilized to analyze the surface and tunnel deformation based on random field theory，in which the spatial variability of cohesion and internal friction angle were taken into account.The results indicated that the fluctuation range of the surface settlement curves cluster expanded with the increasing of related distance of cohesion and internal friction angle，and the effect of vertical related distance on surface settlement deformation was more significant.Furthermore，the influence of the cohesion variation coefficient and internal friction angle on surface settlement deformation was stronger than the effect of related distance.In addition，the distribution of the tunnel deformation values scattered with the increasing of the coefficient of variation of cohesion and internal friction angle，in which the coefficient of variation of internal friction had much influences.Neglecting the spatial variability of cohesion and internal friction angle could result in underestimating the predicted surface settlement and tunnel deformation，making the design more risky.